Optimized Si/SiO2 high contrast grating mirror design for mid-infrared wavelength range: robustness enhancement

Details Optimized Si/SiO2 high contrast grating mirror design for mid-infrared wavelength range: robustness enhancement Optimized Si/SiO2 high contrast grating mirror design for mid-infrared wavelength range: robustness enhancement

2011-11-17

arxiv.org/abs/1111.4101v1

Optics and Laser Technology 44 (2012) 626-630

Physics

Optics

The final publication is available at http://www.sciencedirect.com/science/article/pii/S0030399211002672\#FCANote

Scientific paper

10.1016/j.optlastec.2011.09.010

A high reflectivity and polarization selective high contrast grating mirror has been designed with the use of an automated optimization algorithm. Through a precise study of the tolerance of the different lengths of the structure, the robustness with respect to the fabrication errors has been enhanced to high tolerance values between 5 % and 210 %. This adjustment of the dimensions of the structure leads to a 250 nm large bandwidth mirror well adapted for a VCSEL application at \lambda = 2.65 $\mu$m and can easily be scaled for other wavelengths.

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