Optimization of coating uniformity in an ion beam sputtering system using a modified planetary rotation method

Details Optimization of coating uniformity in an ion beam sputtering system using a modified planetary rotation method Optimization of coating uniformity in an ion beam sputtering system using a modified planetary rotation method

Mar 2011

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2011apopt..50c.316g&link_type=ejournal

Applied Optics, vol. 50, issue 9, p. C316

Physics

Optics

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