Optics applications of chemical vapor deposited beta-SiC

Details Optics applications of chemical vapor deposited beta-SiC Optics applications of chemical vapor deposited beta-SiC

Sep 1997

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1997spie.cr67...71g&link_type=abstract

Proc. SPIE Vol. CR67, p. 71-104, Advanced Materials for Optics and Precision Structures, Mark A. Ealey; Roger A. Paquin; Thomas

Physics

Optics

Scientific paper

The fabrication process, properties and optics applications of transparent and opaque chemical vapor deposited (CVD) (beta) -SiC are reviewed. CVD-SiC is produced by the pyrolysis of methyltrichlorosilane, in excess H2, in a low-pressure CVD reactor. The CVD process has been successfully scaled to produce monolithic SiC parts of diameter up to 1.5-m and thickness 2.5-cm. The characterization of CVD-SiC for important physical, optical, mechanical and thermal properties indicates that it is a superior material for optics applications. Important properties of CVD-SiC are compared with those of the other candidate mirror and window materials. The applications of CVD-SiC for lightweight optics, x-ray telescopes, optical buffers, lens molds, optical standards and windows and domes are discussed in detail.

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