Physics
Scientific paper
Jul 2008
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2008spie.7018e..36b&link_type=abstract
Advanced Optical and Mechanical Technologies in Telescopes and Instrumentation. Edited by Atad-Ettedgui, Eli; Lemke, Dietrich.
Physics
Scientific paper
Flat mirrors as large as 4 meters in diameter can be manufactured to high accuracy, limited by the surface metrology. We present metrology systems that are specifically optimized for measuring very large flats to high accuracy. A large aperture vibration insensitive Fizeau interferometer combined with stitching software provides high resolution surface measurements. Low order shape errors can be measured using scanning slope measurements from precision inclinometers or an autocollimator with scanning pentaprism.
Burge James H.
Su Peng
Yellowhair Julius
Zhao Caisheng
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