Optical And Structural Properties Of Hydrogenated ZnO Thin Films And Their Application For NH3 Gas Sensors

Details Optical And Structural Properties Of Hydrogenated ZnO Thin Films And Their Application For NH3 Gas Sensors Optical And Structural Properties Of Hydrogenated ZnO Thin Films And Their Application For NH3 Gas Sensors

Apr 2007

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2007aipc..899..435d&link_type=abstract

SIXTH INTERNATIONAL CONFERENCE OF THE BALKAN PHYSICAL UNION. AIP Conference Proceedings, Volume 899, pp. 435-436 (2007).

Physics

Dielectric Thin Films, Electrical Properties Of Specific Thin Films, Optical Properties Of Specific Thin Films, Sensors, Remote Sensing

Scientific paper

Measurements of the optical and structural properties of ZnO thin films (ZnO:H) deposited by magnetron sputtering in an Ar+H2 atmosphere have been performed. The optical band gap, Eopt, and the Urbach band tail width were calculated. The influence of the substrate temperature on the resistivity, optical band gap and structural properties has been studied. A discussion of the influence of Ts on the properties is presented. The sensitivity of ZnO films to exposure to NH3 has been measured by the quartz crystal microbalance method.

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