Open pinned-phase CCD technology

Details Open pinned-phase CCD technology Open pinned-phase CCD technology

Nov 1989

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1989spie.1159..363j&link_type=abstract

IN: EUV, X-ray, and gamma-ray instrumentation for astronomy and atomic physics; Proceedings of the Meeting, San Diego, CA, Aug.

Physics

Atomic Physics

1

Charge Coupled Devices, Photonics, Pinning, Coatings, Phosphorus, Sensitivity, Technologies, Ultraviolet Radiation

Scientific paper

A novel CCD technology, open pinned-phase (OPP) technology, is presented. Particular attention is given to the design and process features of an OPP-CCD that unite multi- and virtual-phase technologies. It is found that the OPP/CCD will produce a modest short-wavelength QE and excellent charge collection efficiency characteristics which are similar to those of the virtual-phase CCD. However, expensive processes related to thinning, backside accumulation, and packaging are not required in the present case.

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