On the applicability of Sato's equation to capacitative radio frequency sheaths

Details On the applicability of Sato's equation to capacitative radio frequency sheaths On the applicability of Sato's equation to capacitative radio frequency sheaths

2003-10-08

arxiv.org/abs/physics/0310038v1

J.Phys.D:Appl.Phys.33 (2000), L153-L157

Physics

Plasma Physics

12 pages

Scientific paper

10.1088/0022-3727/33/24/101

We show that the time dependent version of Sato's equation, when applied to
capacitative rf sheaths is no longer independent of the electric field of the
space charge, and discuss the use of the equation for a specific sheath model.

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