New Homogeneous Standards by Atomic Layer Deposition for Synchrotron X-Ray Fluorescence and Absorption Spectroscopies

Details New Homogeneous Standards by Atomic Layer Deposition for Synchrotron X-Ray Fluorescence and Absorption Spectroscopies New Homogeneous Standards by Atomic Layer Deposition for Synchrotron X-Ray Fluorescence and Absorption Spectroscopies

Mar 2012

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2012lpi....43.2666b&link_type=abstract

43rd Lunar and Planetary Science Conference, held March 19–23, 2012 at The Woodlands, Texas. LPI Contribution No. 1659, id.2666

Physics

Scientific paper

New homogeneous multi-layer film standards synthesized using Atomic
Layer Deposition and characterized by multiple analytical methods,
including ellipsometry, RBS, TEM, and synchrotron x-ray fluorescence and
absorption spectroscopies.

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