Near infra-red Mueller matrix imaging system and application to strain imaging

Details Near infra-red Mueller matrix imaging system and application to strain imaging Near infra-red Mueller matrix imaging system and application to strain imaging

2010-09-28

arxiv.org/abs/1009.5549v1

Physics

Optics

Submitted to Thin Solid Films, 14 pages, 10 figures

Scientific paper

We report on the design and performance of a near infra-red Mueller matrix
imaging ellipsometer, and apply the instrument to strain imag- ing in near
infra-red transparent solids. Particularly, we show that the instrument can be
used to investigate complex strain domains in multi-crystalline silicon wafers.

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