Nd:YAG laser machining with multilevel resist kinoforms

Details Nd:YAG laser machining with multilevel resist kinoforms Nd:YAG laser machining with multilevel resist kinoforms

Dec 1991

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1991spie.1527..236e&link_type=abstract

Proc. SPIE Vol. 1527, p. 236-239, Current Developments in Optical Design and Optical Engineering, Robert E. Fischer; Warren J. S

Physics

Scientific paper

Laser micromachining with ten level resist kinoforms, manufactured by
electron-beam lithography, is presented. The kinoforms were shown to
have a diffraction efficiency of 68%. One kinoform was used to drill
nine diffraction-limited holes simultaneously in a 0.10 mm thick
stainless-steel plate. Marking in a silicon wafer was also done.

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