Nanostructuration with visible-light-emitting silicon nanocrystals

Physics

Scientific paper

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Scientific paper

Silicon nanocrystals with diameters between 2.5 and 7 nm were prepared by CO2 laser pyrolysis of silane in a gas flow reactor. A small portion of the particles created in the reaction zone was extracted as a molecular beam through a conical nozzle and deposited at low energy on substrates. Placing suitable masks in front of the substrate, micro- and nanostructured films were obtained. The patterned structures were characterized by atomic force microscopy and transmission electron microscopy while their optical properties were studied by laser scanning confocal microscopy. Nanostructures as small as 30 nm could be produced. The photoluminescence emanating from a regular array of 1.2 μm sized dots composed of Si nanocrystals was studied with spatial, spectral and temporal resolution.

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