Computer Science – Numerical Analysis
Scientific paper
Oct 2005
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2005aipc..799..201d&link_type=abstract
NEW VISTAS IN DUSTY PLASMAS: Fourth International Conference on the Physics of Dusty Plasmas. AIP Conference Proceedings, Volum
Computer Science
Numerical Analysis
Dusty Plasmas, Plasma Simulation, Plasma Transport Processes, High-Frequency Discharges, Numerical Analysis, Silicon Compounds, Dusty Or Complex Plasmas, Plasma Crystals, Plasma Simulation, Transport Properties, High-Frequency And Rf Discharges
Scientific paper
A self-consistent 1D fluid model is used to investigate the formation, growth and transport mechanisms of sub-micrometer particles in a low pressure capacitively coupled radio-frequency silane (SiH4) discharge. In this contribution we analyze the competition between the different forces governing the transport of nanometer-sized particles and the specific role of the thermophoretic force arising from a thermal gradient in gas temperature induced by heating or cooling of the electrodes. Further growth of the nanoparticles due to coagulation is also described by coupling the 1D fluid model with an aerosol dynamics model.
Bogaerts Annemie
de Bleecker K.
Goedheer W. J.
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