Nanometer Spatial Resolution Achieved in Hard X-Ray Imaging and Laue Diffraction Experiments

Details Nanometer Spatial Resolution Achieved in Hard X-Ray Imaging and Laue Diffraction Experiments Nanometer Spatial Resolution Achieved in Hard X-Ray Imaging and Laue Diffraction Experiments

Jan 1994

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1994sci...263..201b&link_type=abstract

Science, Volume 263, Issue 5144, pp. 201-203

Physics

57

Scientific paper

Tapered glass capillaries have successfully condensed hard x-ray beams to ultrasmall dimensions providing unprecedented spatial resolution for the characterization of materials. A spatial resolution of 50 nanometers was obtained while imaging a lithographically prepared gold pattern with x-rays in the energy range of 5 to 8 kiloelectron volts. This is the highest resolution scanning x-ray image made to date with hard x-rays. With a beam 360 nanometers in diameter, Laue diffraction was observed from the smallest sample volume ever probed by x-ray diffraction, 5 x 10-3 cubic micrometers.

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