Multiplexed broadband beam steering system utilizing high speed MEMS mirrors

Details Multiplexed broadband beam steering system utilizing high speed MEMS mirrors Multiplexed broadband beam steering system utilizing high speed MEMS mirrors

2009-02-10

arxiv.org/abs/0902.1574v1

Opt. Express 17 (2009) 7233-7244

Physics

Optics

11 pages, 6 figures, submitted

Scientific paper

We present a beam steering system based on micro-electromechanical systems technology that features high speed steering of multiple laser beams over a broad wavelength range. By utilizing high speed micromirrors with a broadband metallic coating, our system has the flexibility to simultaneously incorporate a wide range of wavelengths and multiple beams. We demonstrate reconfiguration of two independent beams at different wavelengths (780 and 635 nm) across a common 5x5 array with 4 us settling time. Full simulation of the optical system provides insights on the scalability of the system. Such a system can provide a versatile tool for applications where fast laser multiplexing is necessary.

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