Multilayer phase diffraction gratings modeled as a structure in three dimensions

Details Multilayer phase diffraction gratings modeled as a structure in three dimensions Multilayer phase diffraction gratings modeled as a structure in three dimensions

Jan 1993

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1993spie.1742..476h&link_type=abstract

In: Multilayer and grazing incidence X-ray/EUV optics for astronomy and projection lithography; Proceedings of the Meeting, San

Physics

Optics

Fresnel Integrals, Gratings (Spectra), Laminates, Wave Fronts, X Ray Diffraction, Diffraction Patterns, Optical Reflection, Three Dimensional Bodies

Scientific paper

X-ray phase diffraction gratings can be designed to behave in a fashion similar to blazed gratings, directing the majority of the energy into certain desired orders. They should be easy to fabricate using conventional semiconductor production technology, and offer advantages in design flexibility and efficiency over conventional amplitude grating or blazed grating structures. As a multilayered structure, a phase grating has structure in depth as well as across the surface. Most theoretical analyses in the literature treat the embedded structure through simplifying approximations or assumptions. We will discuss a model which treats the embedded structure explicitly using the Fresnel-Kirchhoff integral in the Fraunhofer diffraction limit. This approach produces a set of equations which are identical to the result for an amplitude diffraction grating except for an additional factor which depends on the phase relationships of the various surfaces in the multilayer stack.

Affiliated with

Also associated with

No associations

Rating

Multilayer phase diffraction gratings modeled as a structure in three dimensions does not yet have a rating. At this time, there are no reviews or comments for this scientific paper.

If you have personal experience with Multilayer phase diffraction gratings modeled as a structure in three dimensions, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Multilayer phase diffraction gratings modeled as a structure in three dimensions will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFWR-SCP-O-1265808