Physics – Optics
Scientific paper
Jun 1998
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1998spie.3406...45a&link_type=abstract
Proc. SPIE Vol. 3406, p. 45-69, Current Russian Research in Optics and Photonics: New Methods and Instruments for Space- and Ear
Physics
Optics
6
Scientific paper
We report the experimental results on production of multilayer soft x-ray and EUV mirrors and their application in x-ray spectroscopy and fluorescence analysis, as well as for development of EUV lithographic and x-ray microscopic devices and soft x-ray point sources. The problem of the production and the investigation of short-period x-ray multilayers and multilayer (gamma) -filters is discussed.
Andreev Stefan
Bobashev S. V.
Gaponov Sergey V.
Ragozin Eugene N.
Salashchenko Nikolai N.
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