Multidimensional ERDA measurements and depth profiling of medium-heavy elements

Details Multidimensional ERDA measurements and depth profiling of medium-heavy elements Multidimensional ERDA measurements and depth profiling of medium-heavy elements

Apr 1990

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1990nimpb..50..159g&link_type=abstract

Nuclear Instruments and Methods in Physics Research Section B, Volume 50, Issue 1-4, p. 159-166.

Physics

18

Scientific paper

A multiparameter kinematic-coincidence setup installed earlier at the VICKSI heavy-ion accelerator for nuclear reaction studies was used for elastic recoil detection analysis (ERDA) and depth profiling of medium-heavy elements. With Ar beams of 90 and 180 MeV, two large-area bidimensional position- and time-of-flight resolving counters (one of these a detector telescope delivering additional element and energy resolution) detected target recoils and scattered ions in kinematic coincidence. The depth distributions of e.g. C,O, Si or Fe in various multilayer matrices with up to 20 μm thicknesses were determined simultaneously. To compare resolutions, a single-detector experiment with a 365 MeV 129Xe beam, detecting recoils in the telescope, was performed with e.g. SiO2 and GaAs targets. The preliminary results show that the application of ERDA with heavy ions in the energy range between 2 and 5 MeV/amu is worthwhile to obtain unambiguous identification and depth distributions of medium-heavy elements.

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