Physics – Optics
Scientific paper
2011-02-11
IEEE Photon. Technol. Lett. 23, 1166-1168 (2011)
Physics
Optics
3 pages, 3 figures
Scientific paper
10.1109/LPT.2011.2157487
We report on the realization and optical characterization of a CMOS-compatible silicon-based microresonator/waveguide coupled system, fully integrated on a silicon chip. The device uses a vertical coupling scheme between the resonator and a buried strip waveguide. We demonstrate that its high optical quality follows from the accurate planarization of the waveguide topography. More importantly, we demonstrate a wafer-scale mass fabrication of freestanding planar resonators suspended in air and coupled to the integrated bus waveguides. A nanometer control of the coupling distances allows for a precise and selective excitation of different mode families of the resonator. This opens the door for the realization of stable all-integrated complex resonator systems for optomechanical and metrological applications, with the potential to substitute the nowadays intensive use of complicated fiber-taper coupling schemes.
Ghulinyan Mher
Guider Romain
Pavesi Lorenzo
Pucker Georg
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