Modeling of Perpendicularly Driven Dual-Frequency Capacitively Coupled Plasma

Details Modeling of Perpendicularly Driven Dual-Frequency Capacitively Coupled Plasma Modeling of Perpendicularly Driven Dual-Frequency Capacitively Coupled Plasma

2009-12-28

arxiv.org/abs/0912.5129v1

Physics

Plasma Physics

submitted to Applied Physics Letters

Scientific paper

We proposed an altered configuration for dual-frequency (DF) capacitively coupled plasmas (CCP). In this configuration, two pairs of electrodes are arranged oppositely, and the discharging is perpendicularly driven by two rf sources. With Particle-in-cell/Monte Carlo method, we have demonstrated this configuration can remove the harmful electromagnetic and DF coupling effects in conventional DF-CCP.

Affiliated with

Also associated with

No associations

Rating

Modeling of Perpendicularly Driven Dual-Frequency Capacitively Coupled Plasma does not yet have a rating. At this time, there are no reviews or comments for this scientific paper.

If you have personal experience with Modeling of Perpendicularly Driven Dual-Frequency Capacitively Coupled Plasma, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Modeling of Perpendicularly Driven Dual-Frequency Capacitively Coupled Plasma will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFWR-SCP-O-91626