Physics
Scientific paper
Oct 2001
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2001spie.4601..271z&link_type=abstract
Proc. SPIE Vol. 4601, p. 271-277, Micromachining and Microfabrication Process Technology and Devices, Norman C. Tien; Qing-An Hu
Physics
Scientific paper
The LIGA type process, utilizing SU-8 photoresist as alternative LIGA technology, can fabricate high aspect ratio microstructures without employing synchrotron light and suitable X-ray mask. Based on LIGA type process in this paper, detailed investigations of the modeling and fabrication of micro 3K-2 type planetary gear reducer, such as the modeling and design of micro reducer, CAD of micro gear mask, SU-8 UV photolithography, micro electroforming, micro molding, have been performed. And 400 um thickness sun gear, 400 um thickness planet gear, 200 um thickness fixed inner gear, and 200 um thickness rotary inner gear, whose teeth are 15,11,36,39 respectively, have been obtained. Utilizing these gears, the micro reducer whose modulus, outer diameter and velocity ratio are 0.03, 2mm, 44.2:1, has been assembled and applied in (phi) 2mm micro electro magnetic motor successfully.
Chen Di
Chen Wenyuan
Chen Xiaomei
Wu Xiaosheng
Xu Zhengfu
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