Microstructural Study of Superhard Coatings With TEM And SEM

Physics

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Vacuum Deposition, Metals, Semimetals, And Alloys, Defects And Impurities In Crystals, Microstructure, Transmission Electron Microscopy

Scientific paper

In the present work, TiN was deposited on stainless steel (SS420) using the cathode-spot arc method and the effect of the N2 flow and the chamber pressure on the coating microstructure was studied. TEM examination showed a columnar growth of TiN crystals with different size, while the average thickness was about 0.7 to 1.05 μm and increased as the chamber pressure increased.

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