Microfabrication technologies applied to the production of large-area stress-relieved multilayer beamsplitters

Details Microfabrication technologies applied to the production of large-area stress-relieved multilayer beamsplitters Microfabrication technologies applied to the production of large-area stress-relieved multilayer beamsplitters

Jul 1989

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1989spie.1160...49k&link_type=toc

Proc. SPIE Vol. 1160, p. 49-0, X-Ray/EUV Optics for Astronomy and Microscopy, Richard B. Hoover; Ed.

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Optics

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