Microfabrication of Three-Dimensional Structures in Polymer and Glass by Femtosecond Pulses

Details Microfabrication of Three-Dimensional Structures in Polymer and Glass by Femtosecond Pulses Microfabrication of Three-Dimensional Structures in Polymer and Glass by Femtosecond Pulses

2002-05-09

arxiv.org/abs/physics/0205025v1

Physics

Optics

This is a proceedings paper of bi-lateral Conf. (Republics of China & Lithuania) on Optoelectronics and Magnetic Materials, Ta

Scientific paper

We report three-dimensional laser microfabrication, which enables microstructuring of materials on the scale of 0.2-1 micrometers. The two different types of microfabrication demonstrated and discussed in this work are based on holographic recording, and light-induced damage in transparent dielectric materials. Both techniques use nonlinear optical excitation of materials by ultrashort laser pulses (duration < 1 ps).

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