Micro-optomechanical infrared receiver with optical readout: MIRROR

Physics

Scientific paper

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Scientific paper

An uncooled infrared detector having an optical readout is described. Infrared heat is sensed with bimaterial cantilevers which bend in response to temperature changes. One side of the bimaterial cantilever is an optical reflector. Visible light reflecting off the bent cantilever is detected with a CCD camera to provide the sensor output. We describe this device as a micro-optomechanical infrared receiver with optical readout -- MIRROR. Devices based upon this principle have successfully imaged infrared. Changes to the system are in progress to improve sensitivity.

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