Micro-Hotplates for Thermal Characterisation of Structural Materials of Mems

Details Micro-Hotplates for Thermal Characterisation of Structural Materials of Mems Micro-Hotplates for Thermal Characterisation of Structural Materials of Mems

2008-01-07

arxiv.org/abs/0801.0750v1

Dans 13th International Worshop on THERMal INvestigations of ICs and Systems - THERMINIC 2007, Budapest : Hongrie (2007)

Physics

General Physics

Submitted on behalf of TIMA Editions (http://irevues.inist.fr/tima-editions)

Scientific paper

Accurate knowledge of mechanical and thermal properties of structural materials used in MEMS is essential for optimum geometric and functional design. The extraction of precise physical properties is rather complicated due to the size effects, the complexity of the structures and the variations of formation processes. This work is intended to determine the thermal properties of silicon-nitride and diamond layers applied in thermal sensor structures by analyzing thermal responses of a multilayer micro-heater structure.

Affiliated with

Also associated with

No associations

Rating

Micro-Hotplates for Thermal Characterisation of Structural Materials of Mems does not yet have a rating. At this time, there are no reviews or comments for this scientific paper.

If you have personal experience with Micro-Hotplates for Thermal Characterisation of Structural Materials of Mems, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Micro-Hotplates for Thermal Characterisation of Structural Materials of Mems will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFWR-SCP-O-653272