Micro-electromechanical spatial light modulators with integrated electronics

Details Micro-electromechanical spatial light modulators with integrated electronics Micro-electromechanical spatial light modulators with integrated electronics

Feb 2002

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2002spie.4493..184c&link_type=abstract

Proc. SPIE Vol. 4493, p. 184-190, High-Resolution Wavefront Control: Methods, Devices, and Applications III, John D. Gonglewski;

Statistics

Applications

Scientific paper

This paper describes design and development of a microelectromechanical, micromachined spatial light modulator ((mu) SLM) integrated with complementary metal- oxide semiconductor (CMOS) electronics, for control of optical phase in phase-only optical correlators. The (mu) SLM will consist of a large array of piston-motion MEMS mirror segments (pixels) each of which capable of altering the phase of reflected light by up to one wavelength for infrared (1.5 micrometers ) illumination. Results of a proof-of- concept study are presented along with an electromechanical model and details of the fabrication process for the (mu) SLM.

Affiliated with

Also associated with

No associations

Rating

Micro-electromechanical spatial light modulators with integrated electronics does not yet have a rating. At this time, there are no reviews or comments for this scientific paper.

If you have personal experience with Micro-electromechanical spatial light modulators with integrated electronics, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Micro-electromechanical spatial light modulators with integrated electronics will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFWR-SCP-O-1044091