Statistics – Applications
Scientific paper
Sep 2008
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2008spie.7101e..59l&link_type=abstract
Advances in Optical Thin Films III. Edited by Kaiser, Norbert; Lequime, Michel; Macleod, H. Angus. Proceedings of the SPIE, Vol
Statistics
Applications
1
Scientific paper
Metrology in the soft X-ray range has various applications ranging from instrumentation for solar astronomy to plasma experiments and EUV Lithography. The Physikalisch-Technische Bundesanstalt (PTB) with its laboratory at the electron storage ring BESSY II is a centre of soft X-ray radiometry and supports national and European research and development by carrying out high-accuracy at-wavelength measurements. The absolute detection efficiency of entire detection systems, diodes or cameras can be traced to SI units with a typical relative uncertainty of 0.5 % to 1 % using a cryogenic electrical substitution radiometer. For reflectometry on multilayer mirrors (MLMs) PTB operates a large reflectometer accommodating samples of up to 550 mm in diameter and 50 kg in weight, allowing sample alignment in 6 degrees of freedom. The relative measurement uncertainty for the spectral reflectance is typically in the range of 0.15 % and the long-term reproducibility in the range of 0.10 %. To investigate roughness, scatterometry is employed where scattered light around the specular beam is mapped using a calibrated CCD.
Laubis Christian
Scholze Frank
Ulm Gerhard
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