4. Physics
  5. Optics

Christian Laubis

Physics – Optics

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Scientist

Physikalisch-Technische Bundesanstalt, Germany

Investigation of 3D Patterns on EUV Masks by Means of Scatterometry and Comparison to Numerical Simulations

Physics – Optics
Scientific paper

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Metrology in the soft x-ray range: from EUV to the water window

Statistics – Applications
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Metrology of EUV Masks by EUV-Scatterometry and Finite Element Analysis

Physics – Optics
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Pre-flight calibration of LYRA, the solar VUV radiometer on board PROBA2

Astronomy and Astrophysics – Astrophysics
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Rigorous FEM-Simulation of EUV-Masks: Influence of Shape and Material Parameters

Physics – Optics
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