Astronomy and Astrophysics – Astronomy
Scientific paper
Jul 2006
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2006spie.6273e.115t&link_type=abstract
Optomechanical Technologies for Astronomy. Edited by Atad-Ettedgui, Eli; Antebi, Joseph; Lemke, Dietrich. Proceedings of the S
Astronomy and Astrophysics
Astronomy
1
Scientific paper
The LSST camera focal plane array will consist of individual Si sensor modules, each 42×42mm2 in size, that are assembled into 3×3 "raft" structures, which are then assembled into the final focal plane array. It is our responsibility at Brookhaven National Lab (BNL) to insure that the individual sensors provided by the manufacturer meet the flatness requirement of 5 μm PV and that the assembled raft structure be within the 6.5 μm PV flatness tolerance. These tolerances must be measured with the detectors operating in a cryogenic environment at -100C in a face-down configuration. Conventional interferometric techniques for flatness testing are inadequate to insure that edge discontinuities between detector elements are within the tolerances because of the quarter-wave phase ambiguity problem. For this reason we have chosen a combination of metrology techniques to solve the discontinuity ambiguity problem that include both a full aperture interferometer and a scanning confocal distance microscope. We will discuss concepts for performing flatness metrology testing with these instruments under these conditions and will present preliminary results of measurement sensitivity and repeatability from tests performed on step height artifacts.
Frank James
Geary Joseph
Mahler George
O'Connor Paul
Radeka Veljko
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