Physics – Optics
Scientific paper
Nov 2001
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2001spie.4592..406p&link_type=abstract
Proc. SPIE Vol. 4592, p. 406-413, Device and Process Technologies for MEMS and Microelectronics II, Jung-Chih Chiao; Ed.
Physics
Optics
Scientific paper
Lobster-eye optics are an exciting advance in the field of x-ray astronomy, specifically as focusing optics for wide field of view telescopes. In its simplest form the optic is a square packed array of square-channels. Typical channel dimensions are width 10 - 30 mm, length 300 - 1000 mm, and wall thickness of ~2 - 5 mm. These dimensions raise the question of whether such devices can be made in the deep x-ray LIGA regime. Following recent success in fabricating a low aspect ratio Lobster-eye structure, we discuss some of the parameters for, and production issues involved in making, a useful high aspect ratio Lobster-eye prototype. We report on our initial attempts to produce high aspect ratio Lobster-eye optics using the LIGA process with a Graphite substrate.
Christenson Todd R.
Irving Thomas H.
Mancini Derrick C.
Moldovan Nicolai A.
Nugent Keith A.
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