Astronomy and Astrophysics – Astronomy
Scientific paper
Nov 1999
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1999spie.3782..328z&link_type=abstract
Proc. SPIE Vol. 3782, p. 328-336, Optical Manufacturing and Testing III, H. Philip Stahl; Ed.
Astronomy and Astrophysics
Astronomy
Scientific paper
Development of accurate surface characterization methods is essential for testing micro-optical components, such as micro- opto-electro-mechanical systems (MOEMS), for use in complex optical systems. We consider using an array of 16 micrometer- wide micro-mirrors as programmable slits for astronomical multi-object spectroscopy, and propose a new method based upon Foucault's knife-edge test to characterize local surface deformations of individual micro-mirrors. By measuring local slopes, the surface shape of each mirror in a micro-mirror array has been reconstructed with a sub-nanometer accuracy. In addition to low-order deformation (tilt, curvature, astigmatism), each mirror is seen to be palm-tree shaped. We have checked the validity of our knife-edge test by the micro- characterization of a conventional spherical mirror.
Buat Veronique
Burgarella Denis
Dohlen Kjetil
Lanzoni Patrick
Mazzanti Silvio
No associations
LandOfFree
Knife-edge test for characterization of subnanometer deformations in micro-optical surfaces does not yet have a rating. At this time, there are no reviews or comments for this scientific paper.
If you have personal experience with Knife-edge test for characterization of subnanometer deformations in micro-optical surfaces, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Knife-edge test for characterization of subnanometer deformations in micro-optical surfaces will most certainly appreciate the feedback.
Profile ID: LFWR-SCP-O-1513522