Kinetic Model for Production and Growth of Dust Nanoparticles in Low Pressure Plasmas of RF Discharges

Physics

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Dusty Plasmas, Plasma Kinetic Theory, High-Frequency Discharges, Plasma Pressure, Dusty Or Complex Plasmas, Plasma Crystals, Plasma Kinetic Equations, High-Frequency And Rf Discharges

Scientific paper

A theoretical model is presented to describe the production and the growth of clusters and dust nanoparticles in low-pressure plasmas. The important processes of losses by diffusion and collisions of electrons and ions with the clusters and grains have been taken in consideration. Formulas and equations have been provided to calculate neutral and negative cluster densities according to the number ``n'' of monomers in clusters; the cluster critical ``dimension'' n* which determine the rate for production of dust particles; the value of this rate; the density and average ``dimension'' of these particles.

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