Investigation of Texture and Residual Stresses in Reactive Magnetron Sputtered TiN coatings on M2 Steel Substrates

Details Investigation of Texture and Residual Stresses in Reactive Magnetron Sputtered TiN coatings on M2 Steel Substrates Investigation of Texture and Residual Stresses in Reactive Magnetron Sputtered TiN coatings on M2 Steel Substrates

Apr 2007

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2007aipc..899..631m&link_type=abstract

SIXTH INTERNATIONAL CONFERENCE OF THE BALKAN PHYSICAL UNION. AIP Conference Proceedings, Volume 899, pp. 631-631 (2007).

Physics

Structure And Morphology, Thickness, Crystalline Orientation And Texture, Mechanical And Acoustical Properties, Deposition By Sputtering

Scientific paper

The development of crystallographic texture and residual macro-stresses
during the growth from 500 nm to 4000 nm of TiN films applied by
reactive Closed Field Unbalanced Magnetron Sputtering (CFUBMS) on M2
tool steel at three direct target currents (Id) (namely 4, 6 and 8A)
have been analyzed via X-ray diffraction.

Affiliated with

Also associated with

No associations

Rating

Investigation of Texture and Residual Stresses in Reactive Magnetron Sputtered TiN coatings on M2 Steel Substrates does not yet have a rating. At this time, there are no reviews or comments for this scientific paper.

If you have personal experience with Investigation of Texture and Residual Stresses in Reactive Magnetron Sputtered TiN coatings on M2 Steel Substrates, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Investigation of Texture and Residual Stresses in Reactive Magnetron Sputtered TiN coatings on M2 Steel Substrates will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFWR-SCP-O-1681340