Physics
Scientific paper
Aug 2008
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2008njph...10h3039g&link_type=abstract
New Journal of Physics, Volume 10, Issue 8, pp. 083039 (2008).
Physics
12
Scientific paper
We present a novel computational method for finding the concentration profile which minimizes the elastic energy stored in heteroepitaxial islands. Based on a suitable combination of continuum elasticity theory and configurational Monte Carlo, we show that such profiles can be readily found by a simple, yet fully self-consistent, iterative procedure. We apply the method to SiGe/Si islands, considering realistic three-dimensional shapes (pyramids, domes and barns), finding strongly non-uniform distributions of Si and Ge atoms, in qualitative agreement with several experiments. Moreover, our simulated selective-etching profiles display, in some cases, a remarkable resemblance to the experimental ones, opening intriguing questions on the interplay between kinetic, entropic and elastic effects.
Gatti R.
Montalenti Francesco
Uhlik F.
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