Interface reaction characterization and interfacial effects in multilayers

Details Interface reaction characterization and interfacial effects in multilayers Interface reaction characterization and interfacial effects in multilayers

Jul 1997

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1997spie.3113..204b&link_type=abstract

Proc. SPIE Vol. 3113, p. 204-213, Grazing Incidence and Multilayer X-Ray Optical Systems, Richard B. Hoover; Arthur B. Walker; E

Physics

Optics

1

Scientific paper

The performance of multilayer structures as x-ray, soft x-ray and extreme ultraviolet optics is dependent on the nature of the interfaces between constituent layers. Interfacial structure and the interaction between atoms at interfaces has also been demonstrated to have significant impact on the physical properties of multilayer materials in general and thus on their performance in other applied areas. A short summary of the approaches to characterization of interfaces in multilayer structures is presented as background. Two new techniques for the experimental evaluation of interfacial structure and interfacial structure effects are then considered and examples presented. The paper is concluded with review of these results and an assessment of their implications relative to multilayer development.

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