Instrument for measuring the light scattered by diffraction gratings

Details Instrument for measuring the light scattered by diffraction gratings Instrument for measuring the light scattered by diffraction gratings

Oct 1994

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1994spie.1991...81s&link_type=abstract

Proc. SPIE Vol. 1991, p. 81-86, International Conference on Diffractometry and Scatterometry, Maksymilian Pluta; Mariusz Szyjer;

Physics

Scientific paper

The instrument for measuring the light scattered from optical surfaces is described. The measurement is carried out using the 253 nm wavelength separated from continuous spectrum of high pressure mercury lamp by a double monochromator. Output signals are detected by a photomultiplier whose sensitivity falls rapidly above 300 nm. The sensitivity of the instrument is about 0.5/3 X 108%/, where the numbers 0.5 and 3 X 10(superscript 8 characterize the minimal detectable output signal and the maximal one (in reflected light).

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