Initial performance results for high-aspect ratio gold MEMS deformable mirrors

Details Initial performance results for high-aspect ratio gold MEMS deformable mirrors Initial performance results for high-aspect ratio gold MEMS deformable mirrors

Feb 2009

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2009spie.7209e..20f&link_type=abstract

MEMS Adaptive Optics III. Edited by Olivier, Scot S.; Bifano, Thomas G.; Kubby, Joel A.. Proceedings of the SPIE, Volume 7209

Physics

Optics

Scientific paper

The fabrication and initial performance results of high-aspect ratio 3-dimensional Micro-Electro-Mechanical System (MEMS) Deformable Mirrors (DM) for Adaptive Optics (AO) will be discussed. The DM systems were fabricated out of gold, and consist of actuators bonded to a continuous face sheet, with different boundary conditions. DM mirror displacements vs. voltage have been measured with a white light interferometer and the corresponding results compared to Finite Element Analysis (FEA) simulations. Interferometer scans of a DM have shown that ~9.4um of stroke can be achieved with low voltage, thus showing that this fabrication process holds promise in the manufacturing of future MEMS DM's for the next generation of extremely large telescopes.

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