Physics
Scientific paper
Jul 2010
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2010spie.7733e..71l&link_type=abstract
Ground-based and Airborne Telescopes III. Edited by Stepp, Larry M.; Gilmozzi, Roberto; Hall, Helen J. Proceedings of the SPIE,
Physics
Scientific paper
This paper presents a recent progress in designing a nanometer-accurate inductive-type of edge sensor. A new technology of Direct Deposit on Glass (DDG) has been developed. The DDG technology also has high rate of reproducibility and is suitable for the mass production and still be a very cost-effective solution. The sensor designs are fully optimized using mechanical and EM modeling for specific metrology needs. We discuss briefly on various electronic architectures and their impacts on the maintainability of the system. We conclude the paper by showing the experimental results.
Luong Bruno
Néel Christian
Périn Ambroise
Rozière Didier
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