Physics – Optics
Scientific paper
Sep 2005
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2005spie.5957...40r&link_type=abstract
Integrated Optics: Theory and Applications. Edited by Pustelny, Tadeusz; Lambeck, Paul V.; Gorecki, Christophe. Proceedings of
Physics
Optics
2
Scientific paper
The first fully operational mid-IR (3-5 μm) 256x256 IR-FPA camera system based on a type-II InAs/GaSb short-period superlattice showing an excellent noise equivalent temperature difference below 10 mK and a very uniform performance has been realized. We report on the development and fabrication of the detector chip, i.e., epitaxy, processing technology and electro-optical characterization of fully integrated InAs/GaSb superlattice focal plane arrays. While the superlattice design employed for the first demonstrator camera yielded a quantum efficiency around 30%, a superlattice structure grown with a thicker active layer and an optimized V/III BEP ratio during growth of the InAs layers exhibits a significant increase in quantum efficiency. Quantitative responsivity measurements reveal a quantum efficiency of about 60% for InAs/GaSb superlattice focal plane arrays after implementing this design improvement.
Cabanski Wolfgang
Fleißner Joachim
Fuchs Frank
Rehm Robert
Schmitz Johannes
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