In-process testing for cryo-figuring 1.5 meter diameter auto-collimating flats

Physics – Optics

Scientific paper

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Scientific paper

Three auto-collimating flats (ACFs) of 1.5 meter clear aperture are being manufactured for use in the JSC Cryo-Optical Metrology test of the James Webb Space Telescope. In-process interferometric testing of the ACFs is used to guide their surface-figure processing. The surface measurement is performed in a vacuum chamber at both room (+20 °C) and cryogenic (-240 °C) temperatures. With a 12-inch beam diameter FizCam interferometer, sub-aperture measurements are taken across the ACF diameter at multiple rotations. These measurements are stitched together to compute the surface figure. The figure change between room-temperature and cryogenic temperature is measured and used to enable cryo-figuring based on room-temperature measurements. The data analysis is calibrated to account for gravity sag on test-set optics and surface aberrations caused by vacuum pressure and temperature gradients on vacuum-chamber windows. The first ACF is complete and meets specification with surface error of less than 75 nm RMS.

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