In-process optical metrology for aspheric surfaces

Details In-process optical metrology for aspheric surfaces In-process optical metrology for aspheric surfaces

Sep 1994

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1994spie.2210..625m&link_type=abstract

Proc. SPIE Vol. 2210, p. 625-630, Space Optics 1994: Space Instrumentation and Spacecraft Optics, Thierry M. Dewandre; Joachim J

Physics

Optics

Scientific paper

We realized a digital interferometer for measuring the shape of optical surfaces in an unstable environment. The instrument performs good quality measurements even if it is subjected to severe mechanical vibrations. Interferograms are decoded using a spatial-carrier phase-shifting technique. The system has been mounted over a polishing machine and used for on-line testing of aspheric mirror surfaces.

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