Improved reflectometry facility at the National Institute of Standards and Technology

Details Improved reflectometry facility at the National Institute of Standards and Technology Improved reflectometry facility at the National Institute of Standards and Technology

Feb 1994

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1994spie.2011..534t&link_type=abstract

Proc. SPIE Vol. 2011, p. 534-539, Multilayer and Grazing Incidence X-Ray/EUV Optics II, Richard B. Hoover; Arthur B. Walker; Eds

Physics

Optics

1

Scientific paper

We have recently completed construction of a high throughput, modest resolution soft x-ray monochromator installed at the Synchrotron Ultraviolet Radiation Facility of the National Institute of Standards and Technology. Although this monochromator will be used primarily to characterize the optical properties of multilayer-coated x-ray optics, the versatility of the instrument will enable us to measure such properties as reflectivity, transmission, diffraction, and scatter of a variety of components. We present measurements of monochromator throughput and resolution.

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