Physics – Optics
Scientific paper
Sep 1994
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1994spie.2210..672w&link_type=abstract
Proc. SPIE Vol. 2210, p. 672-680, Space Optics 1994: Space Instrumentation and Spacecraft Optics, Thierry M. Dewandre; Joachim J
Physics
Optics
Scientific paper
A direct method for quantitatively controlling organic as well as inorganic contamination on optical surfaces of witness plates of only 1 cm(superscript 2) is suggested. Measurements by X-ray Photoelectron Spectroscopy (XPS) quantified by appropriate software give the quantity and chemical composition of contamination on any interesting surface with a typical detection limit of better than 10(superscript -9) gcm(superscript -2). Results regarding the contamination growth on different optical materials and coatings under atmospheric conditions are presented. The contamination strongly depends on the chemical and structural properties of the surfaces. Therefore, reliable contamination control has to be done by sensitive measurements on either the surfaces of interest or on similarly treated resp. coated witness plates. To utilize the high sensitivity of the XPS-method, the witness plates have to be prepared and handled very carefully. Appropriate procedures for the contamination control of sensible optical surfaces as well as for the general control of clean rooms and fabrication facilities are described.
Hacker Erich
Raupach L.
Weissbrodt Peter
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