Improved EUV filter transmission with plasma cleaning

Details Improved EUV filter transmission with plasma cleaning Improved EUV filter transmission with plasma cleaning

Jul 2010

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2010spie.7732e..78l&link_type=abstract

Space Telescopes and Instrumentation 2010: Ultraviolet to Gamma Ray. Edited by Arnaud, Monique; Murray, Stephen S.; Takahashi,

Physics

Scientific paper

As-fabricated free-standing indium foils were found to have transmission in the 90nm to 120nm band ranging from 10% to 70% of modeled values based on pure indium. Auger depth profiling of the as-deposited indium showed little surface contamination and high purity. However, final freestanding filters were found to have heavy contamination, particularly on the surface. An argon/hydrogen plasma bombardment was developed which improved EUV transmission by 50% to 500% in the finished filters without causing significant pinholes to develop in the foils or appreciably affecting blocking characteristics.

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