Implicit and electrostatic Particle-in-cell/Monte Carlo model in two dimensional and axisymmetric geometry II: Self-bias voltage effects in capacitively coupled plasmas

Details Implicit and electrostatic Particle-in-cell/Monte Carlo model in two dimensional and axisymmetric geometry II: Self-bias voltage effects in capacitively coupled plasmas Implicit and electrostatic Particle-in-cell/Monte Carlo model in two dimensional and axisymmetric geometry II: Self-bias voltage effects in capacitively coupled plasmas

2010-01-18

arxiv.org/abs/1001.2974v1

2011 Plasma Sources Sci. Technol. 20, 035013

Physics

Plasma Physics

Submitted to Plasma Sources Sci. Technol

Scientific paper

10.1088/0963-0252/20/3/035013

With an implicit Particle-in-cell/Monte Carlo model, capacitively coupled plasmas are studied in two-dimensional and axisymmetric geometry. Self-bias dc voltage effects are self-consistently considered. Due to finite length effects, the self-bias dc voltages show sophisticating relations with the electrode areas. Two-dimensional kinetic effects are also illuminated. Compare to the fluid mode, PIC/MC model is numerical-diffusion-free and thus finer properties of the plasmas are simulated.

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