Holographic lithography for microcircuits

Details Holographic lithography for microcircuits Holographic lithography for microcircuits

May 1990

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1990spie.1212..290c&link_type=toc

Proc. SPIE Vol. 1212, p. 290-296, Practical Holography IV, Stephen A. Benton; Ed.

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