High quality mechanical and optical properties of commercial silicon nitride membranes

Details High quality mechanical and optical properties of commercial silicon nitride membranes High quality mechanical and optical properties of commercial silicon nitride membranes

2007-11-14

arxiv.org/abs/0711.2263v1

Physics

Quantum Physics

4 pages, 4 figures

Scientific paper

10.1063/1.2884191

We have measured the optical and mechanical loss of commercial silicon nitride membranes. We find that 50 nm-thick, 1 mm^2 membranes have mechanical Q > 10^6 at 293 K, and Q > 10^7 at 300 mK, well above what has been observed in devices with comparable dimensions. The near-IR optical loss at 293 K is less than 2E-4. This combination of properties make these membranes attractive candidates for studying quantum effects in optomechanical systems.

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