High Precision Thin CMOS Sensors for Future Vertex Detectors

Physics – Medical Physics

Scientific paper

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Scientific paper

CMOS pixel sensors are developed at IReS-LEPSI since 1999 for future vertex detectors needing very high granularity and minimal material budget. The first prototypes, made of small arrays of a few thousands of pixels, demonstrated the viability of the technology and its high tracking performances. In the last two years, new results on the radiation tolerance and tracking performances of the sensors were obtained, and the first real scale prototype was fabricated and tested. Moreover, a new manufacturing technology was investigated, without epitaxial layer but based on a lightly doped substrate. The contribution summarises the performances observed and provides an outlook on the sensor applications.

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