High performance NbN nanowire superconducting single photon detectors fabricated on MgO substrates

Details High performance NbN nanowire superconducting single photon detectors fabricated on MgO substrates High performance NbN nanowire superconducting single photon detectors fabricated on MgO substrates

2007-12-19

arxiv.org/abs/0712.3295v1

Physics

Optics

Scientific paper

10.1364/OE.16.003191

We demonstrate high-performance nanowire superconducting single photon detectors (SSPDs) on ultrathin NbN films grown at a temperature compatible with monolithic integration. NbN films ranging from 150nm to 3nm in thickness were deposited by dc magnetron sputtering on MgO substrates at 400C. The superconducting properties of NbN films were optimized studying the effects of deposition parameters on film properties. SSPDs were fabricated on high quality NbN films of different thickness (7 to 3nm) deposited under optimal conditions. Electrical and optical characterizations were performed on the SSPDs. The highest QE value measured at 4.2K is 20% at 1300nm.

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