High-performance InSb/In1-xAlxSb focal plane detector arrays grown by MBE

Computer Science – Performance

Scientific paper

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Scientific paper

Results are presented for indium antimonide/indium aluminum antimonide (InSb/InAlSb) diodes grown by molecular beam epitaxy (MBE) for infrared detector applications. By lowering the substrate growth temperature during epitaxy it is possible to increase the dopant activation, both n and p-type. In addition, the Shockley-Read trap density is reduced by a factor X5 to approximately 2 X 10(superscript 13) cm(superscript -3) and the defect density in the MBE grown material falls to approximately 25 cm(superscript -2). The application of these diodes with improved performance to 2D infrared detector arrays with enhanced detectivities operating at higher temperatures will be described. Conventional 2D arrays that operate at 80 K have also been fabricated. Typical noise equivalent temperature difference (NETD) is less than 10 mK for a 1.5 msec stare time.

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